Fluoro rubber seals
Material description: similar to PTFE, perfluoroelastomer has excellent chemical resistance and high temperature resistance.
Common use: perfluorinated series products are widely used in semiconductor industry and information related industries, including PVC, CVD, etching and various high vacuum sealing processes in film manufacturing.
Advantage: excellent heat resistance chemical resistance low Outgassing Plasma resistance
Disadvantages: low temperature resistance characteristics of poor raw material price higher production difficulty
Operating temperature: the normal operating temperature is -250℃+240℃.
Special rubber up to +320℃